Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges

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چکیده

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منابع مشابه

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Article history: Received 25 September 2008 Received in revised form 5 January 2009 Accepted 6 January 2009 Available online 8 January 2009 PACS: 52.65.Rr 52.65.Pp 52.80.Pi

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ژورنال

عنوان ژورنال: Plasma Sources Science and Technology

سال: 2017

ISSN: 1361-6595

DOI: 10.1088/1361-6595/aa5cce